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Yale University
Yale Engineering
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Yale University
Center for Microelectronic
Materials and Structures
P.O. Box 208284
New Haven
CT 06520-8284

Microelectronics Teaching laboratory



Microelectronics Teaching laboratory in µELM is basically a scaled-down version of the research Cleanroom for teaching students the fundamentals as well as practices of solid state device fabrication and characterization.



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Copyright © 2001, Yale University, New Haven, Connecticut, USA.
All rights reserved.
Site made by Takhee Lee.
Comments or suggestions to Arlene A. Ciociola.

Last modified: August
4, 2001.