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Yale University
Yale Engineering
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Yale University
Center for Microelectronic
Materials and Structures
P.O. Box 208284
New Haven
CT 06520-8284

People

The four founding faculty members of µELM are
Richard C. Barker, T.P. Ma, Daniel E. Prober, and Robert Wheeler.

Richard C. Barker also served as its Founding Director until his retirement in June, 2000.

Currently, T.P. Ma and Rob Schoelkopf are Co-Directors of the Center.

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Faculty in µELM

Cleanroom users

List of cleanroom users: (xls,pdf): Updated January 2005

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Faculty in µELM

	Richard C. Barker Professor Emeritus, Electrical Engineering and Applied Physics barker@yale.edu    525 BC (Becton Center), phone:432-4308 fax: 432-7769
	T.P. Ma Professor, Electrical Engineering and Applied Physics (Co-Director of µELM and Chairman of Electrical Engineering) t.ma@yale.edu    319 BC, phone:432-4211 fax:432-7769
	Daniel E. Prober Professor, Applied Physics daniel.prober@yale.edu    417 BC, phone:432-4280
	Robert Wheeler Professor Emeritus, Applied Physics robert.wheeler@yale.edu    427 BC, phone:432-4268 fax:432-4283
	Jerry M. Woodall C. Baldwin Sawyer Professor, Electrical Engineering (Co-Director of µELM) jerry.woodall@yale.edu    513 BC, phone:432-4298 fax:432-6420
	Charles H. Ahn Assistant Professor, Applied Physics charles.ahn@yale.edu    303 BC, phone:432-6421
	Michel H. Devoret Professor, Applied Physics michel.devoret@yale.edu     phone:432-4277
	Jung Han Associate Professor, Electrical Engineering jung.han@yale.edu    019 BC, phone:432-7567 fax:432-7769
	Janet L. Pan Assistant Professor, Electrical Engineering janet.pan@yale.edu    505 BC, phone:432-4733 fax:432-6420
	Mark A. Reed Harold Hodgkinson Professor, Engineering and Applied Science mark.reed@yale.edu    523 BC, 501 BC, phone:432-4306 fax:432-6420
	Robert J. Schoelkopf Assistant Professor, Applied Physics robert.schoelkopf@yale.edu    423 BC, phone:432-4289
	Fred J. Sigworth Professor, Cellular and Molecular Physiology fred.sigworth@yale.edu    BE42, Sterling Hall of Medicine, phone:785-5773 fax:785-4951

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Cleanroom users

	HUIMING BU huiming.bu@yale.edu Mastership(s): Office Phone: 2-4209
	ELENA CIMPOIASU elena.cimpoiasu@yale.edu Mastership(s): Office Phone:
	LUIGI FRUNZIO luigi.frunzio@yale.edu Mastership(s): Ellipsometer Office Phone: 432-4268
	DECHAO GUO dechao.guo@yale.edu Mastership(s): Edwards, RTA Office Phone:
	JASON HOFFMAN jason.hoffman@yale.edu Mastership(s): Office Phone:
	XIA HONG xia.hong@yale.edu Mastership(s): Wetbench Office Phone: 432-7044
	JAMES HYLAND hyland@lightspintech.com Mastership(s): Pete/PECVD Office Phone:
	TOLGA KAYA tolga.kaya@yale.edu Mastership(s): EVG, Lourell Spinner, PETE Office Phone:
	KATE KLEMIC kathryn.klemic@yale.edu Mastership(s): Office Phone: 5-5775
	HOO-JEONG LEE hoo-jeong.lee@yale.edu Mastership(s): Office Phone:
	WEIPENG LI weipeng.li@yale.edu Mastership(s): Furnaces Office Phone: 432-4207
	XIAOHUI (Frank) LI xiaohui.li@yale.edu Mastership(s): Office Phone: 432-4240
	YANXIANG LIU yanxiang.liu@yale.edu Mastership(s): CRC Chair Office Phone: 432-4240
	ABIGAIL LUBOW abigail.lubow@yale.edu Mastership(s): Office Phone:
	JOSEPH MCMANIS joseph.mcmanis@yale.edu Mastership(s): HTG Maskaligner Office Phone: 432-7523
	LEIDONG MAO leidong.mao@yale.edu Mastership(s): EVG Maskaligner Office Phone: 432-4240
	MICHAEL METCALFE michael.metcalfe@yale.edu Mastership(s): Office Phone:
	RYAN MUNDEN ryan.munden@yale.edu Mastership(s): Office Phone:
	AGHAM-BAYAN POSADAS agham-bayan.posadas@yale.edu Mastership(s): Office Phone: 2-7044
	MATTHEW REESE matthew.reese@yale.edu Mastership(s): Lesker Office Phone: 2-4129
	CHAD RIGETTI chad.rigetti@yale.edu Mastership(s): Office Phone: 2-9417
	DAVID ROUTENBERG david.routenberg@yale.edu Mastership(s): USER QUAL, Benno Office Phone: 432-4240
	ARIC SANDERS aric.sanders@yale.edu Mastership(s): Office Phone:
	DAVID SCHUSTER david.schuster@yale.edu Mastership(s): Varian Office Phone:
	MINGHAO SHEN minghao.shen@yale.edu Mastership(s): Office Phone: 432-4129
	LIYANG SONG liyang.song@yale.edu Mastership(s): Office Phone:
	ERIC STERN eric.stern@yale.edu Mastership(s): USER QUAL, Asher, Pete Office Phone: 2-4240
	CHRIS TILLINGHAST christopher.tillinghast@yale.edu Mastership(s): Office Phone: 2-4303
	MIAOMIAO WANG miaomiao.wang@yale.edu Mastership(s): Office Phone:
	XIEWEN WANG xie-wen.wang@yale.edu Mastership(s): Dektak Office Phone: 2-4310
	JIAN XU j.xu@yale.edu Mastership(s): EVG Maskaligner Office Phone: 6-2151
	CHUN-CHEN (Frank) YEH chun-chen.yeh@yale.edu Mastership(s): Chemical Waste Office Phone:
	MICHAEL YOUNG michael.p.young@yale.edu Mastership(s): Office Phone:
	XIANG (Shawn) YU yu.xiang@yale.edu Mastership(s): Office Phone:
	ARISTO YULIUS aristo.yulius@yale.edu Mastership(s): Office Phone: 6-0300
	JUN-FEI ZHENG jun-fei.zheng@yale.edu Mastership(s): Office Phone:
	Mastership(s): Office Phone:

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Arlene Ciociola Senior Administrative Assistant and the uELM center's administrative staff arlene.ciociola@yale.edu    phone:432-2213 fax:432-7769

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All rights reserved.
Site made by Takhee Lee.
Comments or suggestions to Arlene A. Ciociola.

Last modified: May 23, 2003