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Yale University
Yale Engineering
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Yale University
Center for Microelectronic
Materials and Structures
P.O. Box 208284
New Haven
CT 06520-8284

Nanotechnology Laboratory



Nanotechnology laboratory in µELM has a E-beam lithography exposure tool for writing images with sub-100 nm features, and an SPM (scanning probe microscope) machine for imaging samples with atomic resolution.



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Copyright © 2001, Yale University, New Haven, Connecticut, USA.
All rights reserved.
Site made by Takhee Lee.
Comments or suggestions to Arlene A. Ciociola.

Last modified: August
4, 2001.