







How to get to Yale
How to get to us
Contact us
Yale University
Yale Engineering
Yale Electrical Engineering
Yale Applied Physics
Yale University
Center for Microelectronic
Materials and Structures
P.O. Box 208284
New Haven
CT 06520-8284
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Nanotechnology Laboratory
Nanotechnology laboratory in µELM has a E-beam lithography exposure tool for writing
images with sub-100 nm features, and an SPM (scanning probe microscope) machine for imaging samples with atomic
resolution.
Faculty
Facility pictures
Copyright
© 2001, Yale University, New Haven,
Connecticut, USA.
All rights reserved.
Site made by Takhee Lee.
Comments or suggestions to Arlene A. Ciociola.
Last modified: August 4, 2001.
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