T.P. Ma
Raymond John Wean Professor
Chairman
Dept. of Electrical Engineering
Yale University
New Haven, CT 06520-8284
Phone: 203-432-4211
Fax: 203-432-7769
Email: t.ma@yale.edu
 

Research
Lab Facilities
StudentLab for course EE421
Cleanroom Facility


Wetbench area in the student lab. (click to enlarge)

There are two mask aligners in the student lab. (click to enlarge)

Cookie is the metal evaporation system. (click to enlarge)

There are four furnaces in the student lab for wet oxidation, dry
oxidation, n+ doping and p+ doping respectively. (click to enlarge)

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