Ten Representative Publications
Journal Papers
Books and Book Chapters
1974-1989 | 1989
- 1999 | 2000 - 2006
68. Y. Nishioka, Y. Ohji, R. Haruta, E. da Silva,
T. Sugano, and T.P. Ma, `Passivation Effects of Fluorine at the
Si Surface During Ultra-dry Oxidation', Solid-State Electronics,
33, Supplement, 389 (1990).
69. M.C. Bashaw, T.P. Ma, R.C. Barker, S. Mroczkowski,
and R.R. Dube, `Introduction, Revelation, and Evolution of Complementary
Gratings in Photorefractive Bismuth Silicon Oxide', Phys. Rev.B.
42, 5641 (1990).
70. M.C. Bashaw, T.P. Ma, R.C. Barker, and R.R. Dube,
`Theory of Complementary Holograms Arising from Electron-Hole Transport
in Photorefractive Media', J. Opt. Soc. Am. B, 7, 2329 (1990).
71. B. Yu, E. Arai, Y. Nishioka, Y. Ohji, S. Iwata,
and T.P. Ma, `Investigation of Fluorine in SiO2 and on Si Surface
by the 19F(p,a,g)16O Reaction, Secondary-ion Mass Spectrometry and
X-ray Photoelectron Spectroscopy', Appl. Phys. Lett., 56(15), 1430
(1990).
72. Y. Wang, T.P. Ma, and R.C. Barker, `Early Stages
of Interface-Trap Transformation in Metal-SiO2-(100)Si Structures',
J. Appl. Phys., 68(5), 2520 (1990).
73. L. Vishnubhotla, W. Chen, and T.P. Ma, `AC Conductance
Measurements on Radiation-Damaged (100)Si/SiO2 Interface After Defect
Transformation', Appl. Phys. Lett., 57(17), 1778 (1990).
74. Y. Nishioka, T. Itoga, K. Ohyu, M. Kato, and T.P.
Ma,`Radiation Effects on Fluorinated Field Oxides and Associated
Devices,' IEEE Trans. Nucl. Sci., 37, 2026 (1990).
75. Y. Nishioka, M. Kato, Y. Ohji, and T.P. Ma, `Time
Dependent Changes of Parasitic Effects Induced by Hogh-field Electron
Injection in MOS Transistors', J. Appl. Phys., 69(1), 528 (1991).
76. Y. Nishioka, Y. Ohji, and T.P. Ma, `Gate-Oxide
Breakdown Accelerated by Large Drain Current in N-channel MOSFETs',
IEEE Electron Dev. Letts.,12, 134 (1991).
77. W. Chen and T.P. Ma, `Time Evolution of Capture
Cross-Sections of Radiation-Induced Si/SiO2 Interface Traps Studied
by Single-Frequency AC Conductance Technique', J. Appl. Phys., 70(2),
860, (1991).
78. W. Chen and T.P. Ma, `A New Technique for Measuring
Lateral Distribution of Oxide Charge and Interface Traps Near MOSFET
Junctions', IEEE Electron Dev. Letts., EDL-12, 393 (1991).
79. W. Chen, A. Balasinski, and T.P. Ma, `Lateral
Distribution of Radiation-Induced Damage in MOSFET's', IEEE Trans.
Nucl. Sci., NS-38, 1124 (1991).
80. H. Muto, M.H. Tsai, and T.P. Ma, `Random Telegraph
Signals in Small MOSFET's after X-ray Irradiation and Annealing',
IEEE Trans. Nucl. Sci., NS-38, 1116 (1991).
81. Y. Nishioka, T. Itoga, K. Ohyu, and T.P. Ma, `Improving
Hot-Electron Hardness of Narrow Channel MOSFET's by Fluorine Implantation',
Solid State Electronics, 34, 1197 (1991).
82. Binglong Zhang and T.P. Ma, `Back Channel Hot-Electron
Effect on the Front Channel Characteristics in Thin-Film SOI MOSFET's',
IEEE Electron Dev. Lett., EDL-12, 699 (1991).
83. L. Vishnubhotla, T.P. Ma, H. Tseng, and P. Tobin,
`Interface Trap Generation and Electron Trapping in Fluorinated
SiO2,' Appl. Phys. Lett, 59, 3595 (1991).
84. N. Haneji, L. Vishnubhotla, and T.P. Ma, `Possible
Observation of Pb0 and Pb1 Centers at Irradiated (100)Si/SiO2 Interface
from Electrical Measurements', Appl. Phys. Lett, 59, 3416 (1991).
85. C..L. Hwang, B. Chen, T.P. Ma, J. Golz, Y.Di,
B. Halpern, and J. Schmitt, `Ferroelectric Pb(Zr,Ti)O3Thin Films
Prepared by Gas Jet Deposition', Integrated Ferroelectrics, 2, 221
(1992).
86. X.W. Wang, A. Balasinski, and T.P. Ma, `Preoxidation
Fluorine Implantation into Si: Process Related MOS Characteristics',
J. Electrochem. Soc., 139, 244 (1992)
87. Balasinski, W. Chen, and T.P. Ma, `Effects of
Combined X-Ray Irradiation and Hot-Electron Injection on NMOS Transistors',
Journal of Electronic Materials, 21, 737 (1992).
88. Z.H. Liu, P. Nee, P.K. Ko, C. Hu, C.G. Sodini,
B.J. Gross, T.P. Ma, and Y..C. Cheng, `Field and Temperature Acceleration
of Time-Dependent Dielectric Breakdown for Reoxidized-Nitrided and
Fluorinated Oxides', IEEE Electron Dev. Lett, EDL-13, 41 (1992).
89. L. Vishnubhotla and T.P. Ma, `Energy Shift of
(100)Si/SiO2 Interface Traps Resulting from Avalanche Hole Injection',
J. Appl. Phys., 71(2), 1058 (1992).
90. Balasinski and T.P. Ma, `Enhanced Electron Trapping
Near Channel Edges in NMOS Transistors', IEEE Trans. Electron Dev.,
ED-39(7), 1680 (1992).
91. Wenliang Chen, Artur Balasinski, and T.P. Ma,
`A Charge Pumping Method for Rapid Determination of Interface-Trap
Parameters in Metal-Oxide-Semiconductor (MOS) Devices', Review of
Scientific Intrusments, 63, 3188 (1992).
92. Wenliang Chen, Artur Balasinski, Binglong Zhang,
and T.P. Ma, `Hot-Carrier Effects on Interface-Trap Capture Cross-Sections
in MOSFET as Studied by Charge Pumping', IEEE Electron Dev. Lett,
EDL-13, 201 (1992).
93. Acovic, C. Hsu, L. Hsia, A. Balasinski, and T.P.
Ma, `Effects of X-ray Irradiation on GIDL in MOSFETs', IEEE Electron
Dev. Lett, EDL-13, 189 (1992).
94. K. Tamer San, Cetin Kaya, David Liu, T.P. Ma,
Man Wang, Pradeep Shah, `A New Technique for Determining the Capacitive
Coupling Coefficients in Flash PROMs', IEEE Electron Dev. Lett,
EDL-13, 328 (1992).
95. Binglong Zhang, Akira Yoshino, and T.P. Ma, `Single-Transistor
Latch Induced Degradation of Front and Back Channel Thin-Film SOI
Transistors', IEEE Electron Dev. Lett, EDL-13, 282 (1992).
96. Wenliang Chen and T.P. Ma, `Oxide Charge Build-up
and Spread-out During Channel-Hot-Carrier Injection in NMOSFET's',
IEEE Electron Dev. Lett, EDL-13, 319 (1992).
97. K. Tamer San, and T.P. Ma, `Determination of Trapped
Oxide Charge in Flash EPROMs and MOSFETs with Thin Oxides', IEEE
Electron Dev. Lett, EDL-13, 439 (1992).
98. W.R. Anderson, R.G. Wheeler, and T.P. Ma, `Observation
of Interface Traps in the Silicon Conduction Band at the (100)Si/SiO2
Interface at 4.2 K', Appl. Phys. Lett, 61(9), 1107 (1992).
99. X.W. Wang and T.P. Ma, `Passivation of (111)Si/SiO2
Interface by Fluorine', Appl. Phys. Lett, 60(21), 2634 (1992).
100. T.P. Ma, `MOS Gate Oxide Reliability and the
Role of Fluorine', J. Vac. Sci. Technology A, 10(4), 705 (1992).
101. Ming-Horn Tsai, H. Muto, and T.P. Ma, `Random
Telegraph Signals Arising from Fast Interface States in MOS Transistors',
Appl. Physics. Lett, 61(14), 1691 (1992).
102. S.P. Jeng, T.P. Ma, R. Cauteri, M. Anderle, and
G. Rubloff, `Anomalous Diffusion of Fluorine in Silicon', Appl.
Phys. Lett, 61(11), 1310 (1992).
103. Dechang Wang, T.P. Ma, John Golz, Bret Halpern,
and Jerome Schmitt, `High Quality MNS Capacitors Prepared by Jet
Vapor Deposition at Room Temperature', IEEE Electron Dev. Lett,
13(9), 482 (1992).
104. Akira Yoshino, T.P. Ma, and K. Okumura, `Hot-Carrier
Effects in Fully Depleted Submicrometer NMOS/SIMOX as Influenced
by Back Interface Degradation', IEEE Electron Dev. Lett, 13(10),
522 (1992).
105. Weliang Chen, Artur Balasinski, and T.P. Ma,
`Evolution of Capture Cross-Sections of Radiation-Induced Interface
Traps in MOSFET's as Studied by a Rapid Charge Pumping Technique',
IEEE Trans. Nucl. Sci., 39, 2152 (1992)
106. Artur Balasinski and T.P. Ma, `Ionizing Radiation
Damage Near CMOS Transistor Channel Edges', IEEE Trans. Nucl. Sci.,
39, 1998 (1992)
107. Ming-Horn Tsai and T.P. Ma, `Effect of Radiation-Induced
Interface Traps on 1/f Noise in MOSFET's', IEEE Trans. Nucl. Sci.,
39, 2178 (1992)
108. X.W. Wang, Y. Wang, D. Wang, and T.P. Ma, `Improvement
of Radiation Hardness due to Aging of Fluorinated and Chlorinated
SiO2/Si MOS Capacitors', IEEE Trans. Nucl. Sci., 39, 2252 (1992)
109. T.P. Ma, `Reliability Issues Concerning Thin
Gate SiO2 and SiO2/Si Interface for ULSI Applications', Nuclear
Instruments and Methods in Physics Research, B74, 295 (1993).
110. Wenliang Chen, Artur Balasinski, and T.P. Ma,
`Lateral Profiling of Oxide Charge and Interface Traps Near MOSFET
Junctions', IEEE Trans. Electron Dev., 40(1), 187 (1993).
111. L. Vishnubhotla, T.P. Ma, H.H. Tseng, and P.
Tobin, `Effects of Avalanche Hole Injection in Fluorinated SiO2
MOS Capacitors,' IEEE Electron Dev. Letts., EDL-14(4), 196 (1993).
112. Ming-Horn Tsai and T.P. Ma, `1/f Noise in Hot-Carrier
Damaged MOSFET's: Effects of Oxide Charge and Interface Traps',
IEEE Electron Dev. Letts., EDL-14(5), 256 (1993).
113. Artur Balasinski and T.P. Ma, `Reduction of Interface-Trap
Density in Metal-Oxide-Semiconductor (MOS) Devices by Irradiation',
Appl. Phys. Letts., 62(24), 3170 (1993).
114. W.R. Anderson, D.R. Lombardi, R.G. Wheeler, and
T.P. Ma, `Determination of Si/SiO2 Interface Roughness Using Weak
Localization', IEEE Electron Dev. Letts., EDL-14(7), 351 (1993).
115. Ming-Horn Tsai, Hirotaka Muto, and T.P. Ma, `Reply
to "Comment on {\it Random Telegraph Signals Arising From Fast
Interface States in Metal-SiO2-Si Transistors', Appl. Phys. Letts.,
63(10), 1444, (1993).
116. Balasinski and T.P. Ma, `Impact of Radiation-Induced
Nonuniform Damage Near MOSFET Junctions', IEEE Trans. Nuclear Science,
40(6), 1286, (1993).
117. Minghorn Tsai, Binglong Zhang, T.P. Ma, and L.K.
Wang, `Random Telegraph Signals in Accumulation-Mode SOI/nMOSFET's'
IEEE Electron Dev. Letts., EDL-15(4), 135 (1994).
118. Binglong Zhang, Artur Balasinski, and T.P. Ma,
`Hot-Carrier Effects on Gate-Induced-Drain-Leakage (GIDL) Current
in Thin-Film SOI/NMOSFET's', IEEE Electron Dev. Letts., EDL-15(5),
169 (1994).
119. Ming-Horn Tsai and T.P. Ma, `The Impact of Device
Scaling on the Current Fluctuations in MOSFET's' IEEE Trans. Electron
Dev., ED-41(11), 2061 (1994).
(requires Adobe®
Acrobat® Reader® to view.)
120. C. Szeles, B. Nielson, P.Asoka-Kumar, K. Lynn,
A. Anderle, T.P. Ma, and G. Rubloff, "Role of Implantation Induced
Defects in Surface-Oriented Diffusion of Fluorine in Silicon", J.
Appl. Phys., 76(6), 3403 (1994).
121. Ming-horn Tsai, T.P. Ma, and Terence B. Hook,
"Channel Length Dependence of Random Telegraph Signal in Sub-Micron
MOSFET's", IEEE Electron Dev. Letts., 15(12), 504 (1994).
122. X.W. Wang, T.P. Ma, G.J. Cui, T. Tamagawa, J.
Golz, S. Kareci, B. Halpern, and J.J. Schmitt, "Highly Reliable
Silicon Nitride Films Made by Jet Vapor Deposition", Jpn. J. Appl.
Phys. 34, Pt.1., No.2B, pp.955-958 (1995).
123. K. Tamer San, Cetin Kaya, and T.P. Ma, "Effects
of Erase Source Bias on Flash EPROM Device Reliability'' IEEE Trans.
Electron Dev., 42(1), 150 (1995).
124. Mallik, X.W. Wang, and T.P. Ma, "Interface Traps
in Jet Vapor Deposited Silicon Nitride-Silicon Capacitors", J. Appl.
Phys., 79(11), 8507 (1996).
125. Jin-Ping Han, Jun Gu, and T.P. Ma, "SrBi2Ta2O9
(SBT) Thin Films Prepared by Electrostatic Spray", Integrated Ferroelectrics,
14, 229 (1997).
126. Jin-Ping Han and T.P. Ma, "Electrode Dependence
of Hydrogen-Induced Degradation in Ferroelectric Pb(Zr,Ti)O3 and
SrBi2Ta2O9 Films", Appl. Phys. Lett., 71(9), 1267 (1997).
127. Y. Shi, X.W. Wang, G.J. Gu, T. Tamagawa, and
T.P. Ma, "Ultra-Thin Silicon Dioxide Prepared by Room-Temperature
Jet Vapor Deposition", Proc. of 4th Symp. on Silicon Nitride and
Silicon Dioxide Dielectric, p.338 (1997).
128. Whye-Kei Lye, Eiji Hasegawa, T.P. Ma, R.C. Barker,
Yin Hu, John Kuehne, and David Frystak, "Quantitative Inelastic
Tunneling Spectroscopy in the Silicon Metal-Oxide-Semiconductor
System", Appl. Phys. Lett., 71(17), 2523 (1997).
129. Jin-Ping Han and T.P. Ma, "Top Electrode Dependence
of Forming Gas Annealing Effects on Ferroelectric Films", Integrated
Ferroelectrics, 17, 471 (1997).
130. Jin-Ping Han and T.P. Ma, "SrBi2Ta2O9 Memory
Capacitor on Si with Nitride Buffer", Appl. Phys. Lett., 72(10),
1185 (1998).
131. Chun Chen and T.P. Ma, "Direct Lateral Profiling
of Hot-Carrier-Induced Oxide Charge and Interface Traps in Thin
Gate MOSFET's", IEEE Transactions on Electron Device, 45(2), 512
(1998).
132. Chun Chen, Zhi-Zheng Liu, and T.P. Ma, "Analysis
of Enhanced Hot-Carrier Effects in Scaled Flash Memory Devices",
IEEE Transactions on Electron Device, 45(7), 1524 (1998).
133. Jin-Ping Han, Xin Guo, and T.P. Ma, "Memory Effects
of SrBi2Ta2O9 Capacitor on Silicon with a Silicon Nitride Buffer",
Integrated Ferroelectrics, 22, 213 (1998).
134. T.P. Ma, "Making Silicon Nitride Film A Viable
Gate Dielectric", invited paper, IEEE Transactions on Electron Devices,
45(3), 680 (1998).
135. Yujun Li and T.P. Ma, "A Front-Gate Charge-Pumping
Method for Probing Both Interfaces in SOI Devices", IEEE Transactions
on Electron Device, 45(6), 1329 (1998).
136. Xin Guo and T.P. Ma, "Tunneling Leakage Current
in Oxynitride: Dependence on Oxygen/Nitrogen Content", IEEE Electron
Device Letters, 19(6), 207 (1998).
137. Y. Shi, X. Wang, and T.P. Ma, "Tunneling Leakage
Current in Ultra-Thin (< 4nm) Nitride/Oxide Stack Dielectrics,"
IEEE Electron Device Letters, 19(10), 388 (1998).
138. Y. Shi, T.P. Ma, S. Prasad, and S. Handa, "Polarity
Dependent Tunneling Current and Oxide Breakdown in Dual-Gate CMOSFETs",
IEEE Electron Device Letters, 19(10), 391 (1998).
139. Y. Shi, T.P. Ma, S. Prasad, and S. Handa, "Polarity
Dependent Tunneling Current in Dual-Gate CMOSFETs", IEEE Trans.
on Electron Devices, 45(11), 2355 (1998).
140. Jin-Ping Han and T.P. Ma, "Ferroelectric-Gate
Transistor as a Capacitor-Less DRAM Cell (FEDRAM)", Integrated Ferroelectrics,
27, 9 (1999).
141. W. Lu, X.W. Wang, R. Hammond, A. Kuliev, S. Koester,
J.O. Chu, K. Ismail, T.P. Ma, and I. Adesida, "P-Type SiGe Transistors
with Low Gate Leakage Using SiN Gate Dielectric", IEEE Electron
Dev. Lett., 20(10), 514 (1999).
142. Y. Shi, X. Wang, and T.P. Ma, "Electrical Properties
of High-Quality Ultra-Thin Nitride/Oide Stack Dielectrics", IEEE
Trans. on Electron Devices, 46(2), 362 (1999).
143. M. Khare, X.W. Wang, and T.P. Ma, ''Transconductance
in Nitride-Gate or Oxynitride-Gate Transistors", IEEE Electron Device
Letters, {20(1), 57 (1999).
144. W. Lu, X. Wang, R. Hammond, A. Kuliev, J. Chu,
K. Ismail, T. Ma, and I. Adesida, "p-Type SiGe Transistors with
Low Gate Leakage Using SiN Gate Dielectric", IEEE Electron Device
Letters, vol.20(10), 510 (1999).
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