| Research
Lab Facilities
StudentLab for course EE421
Cleanroom
Facility
IETS setting up: Inelastic Electron Tunneling
Spectroscopy for phonon and trap probing. (click
to enlarge) |
Cascade probe station is used for
electrical characterization.
(vibration free,
low noise) Wafer size: up to 8 inches (click to enlarge) |
Molecular Atomic Deposition system (MAD): Deposition of nitride and metal oxide
for the application of gate dielectrics. (click
to enlarge) |
Wenworth probe station is used for electrical characterization. Wafer size: 2-8
inch. (click to enlarge) |
MMR probe station is used for electrical characterization. Temp range: 77K to
700K. (click to enlarge) |
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