COURSES BY PROF. KÖŞER

Miniature pressure sensors, accelerometer chips, rate gyroscopes, tiny fluidic systems for medical applications and drug delivery, stamp-sized opto-mechanical assemblies and displays, and tiny portable power generators are all examples of microelectromechanical devices (MEMS). Designing and building this class of sensors and actuators require an interdisciplinary knowledge ranging from microfabrication to mechanics to electromagnetism. This class presents an introduction to the broad field of MEMS, using examples and design projects drawn from real-world MEMS applications. Lectures during the first 2/3 of the term will cover material properties, microfabrication technologies, structural behavior, sensing techniques, actuation schemes, fluid behavior, simple electronic circuits and feedback systems. Student teams will design a complete microsystem along their interests to meet a set of specifications based on realistic microfabrication processes. Modeling and simulation in the design process is emphasized. This class is open to all Engineering and Science graduate students (and seniors with permission of the instructor).

The class presents a solid introduction to microelectronic circuit components, including models for various diodes and active devices (MOS and BJT based), single-ended and differential amplifiers, current sources and active loads, operational amplifiers, feedback, and design of analog circuits for signal amplification and conditioning. Wherever possible, design-oriented methods are emphasized by studying the trade-offs in circuit design and gaining analytical insight about circuit examples. An important goal of this course is to convey an appreciation for the capabilities and limitations of integrated electronics by studying the underlying physics of various semiconductor devices.