Quartz Tuning Fork with Integrated Tip

Below is a summary of our work to date. It includes:

Electrical Characterization of the Probe
We have implemented a circuit that cancels the parallel resonance, yielding a spectrum that has only the series resonance. We fit this spectrum to a Lorentzian, yielding the impedance at resonance, f0 and Q. From these numbers, we determine the electrical parameters of the series resonance, R, L, and C.

SEM Images of a Quartz Fork with Integrated Tip
We have taken SEM images of one of the tips to document the geometry. While the tip structure is clear, it is not seen to be very sharp.

AFM Image Taken with the Probe
Image of a grating with 3 micron periodicity and 25.5 nm step heights taken using the probe as an AFM sensor. It shows clearly that the system works. Issues that remain include the size of the probe. We believe that the lateral dimensions are still relatively large (>100 nm).